Impact of gate line edge roughness on double-gate FinFET performance variability

Kedar Patel; Tsu-Jae King Liu; Costas Spanos

doi:10.1117/12.773065

19 March 2008 Impact of gate line edge roughness on double-gate FinFET performance variability

Kedar Patel, Tsu-Jae King Liu, Costas Spanos

Proceedings Volume 6925, Design for Manufacturability through Design-Process Integration II; 69251I (2008) https://doi.org/10.1117/12.773065
Event: SPIE Advanced Lithography, 2008, San Jose, California, United States

Abstract

The impact of gate line edge roughness (LER) on the performance variability of 32nm double-gate (DG) FinFETs is investigated using a framework that links device performance to commonly used LER descriptors, namely correlation length (ξ), RMS amplitude or standard deviation (σ) of the line edge from its mean value, and roughness exponent (α). This modeling approach is more efficient than Monte-Carlo TCAD simulations, and provides comparable results with appropriately selected input parameters. The FinFET device architecture is found to be robust to gate LER effects. Additionally, a spacer-defined gate electrode provides for dramatically reduced variability in device performance compared to a resist-defined gate electrode, which indicates that gate-length mismatch contributes more to variability in performance than lateral offset between the front and the back gate.

Citation Download Citation

Kedar Patel, Tsu-Jae King Liu, and Costas Spanos "Impact of gate line edge roughness on double-gate FinFET performance variability", Proc. SPIE 6925, Design for Manufacturability through Design-Process Integration II, 69251I (19 March 2008); https://doi.org/10.1117/12.773065

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