Paper
28 December 2007 Efficient defect structure analysis in semi-insulating materials by support vector machine and relevance vector machine
Stanisław Jankowski, Janusz Będkowski, Przemysław Danilewicz, Zbigniew Szymański
Author Affiliations +
Proceedings Volume 6937, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2007; 69371U (2007) https://doi.org/10.1117/12.784706
Event: Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2007, 2007, Wilga, Poland
Abstract
We propose new approach for defect centers parameters extraction in semi-insulating GaAs. The experimental data is obtained by high-resolution photoinduced transient spectroscopy (HR-PITS). Two algorithms have been introduced: support vector machine - sequential minimal optimization (SVM-SMO) and relevance vector machine (RVM). Those methods perform the approximation of the Laplace surface. The advantages of proposed methods are: good accuracy of approximation, low complexity, excellent generalization. We developed SVM-RVM-PITS system, which enables graphical representation of Laplace surface, defining local area for defect parameter extraction, choosing the SVM or RVM method for approximation, calculation of the Arrhenius line factors and finally the parameters of the defect centers.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Stanisław Jankowski, Janusz Będkowski, Przemysław Danilewicz, and Zbigniew Szymański "Efficient defect structure analysis in semi-insulating materials by support vector machine and relevance vector machine", Proc. SPIE 6937, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2007, 69371U (28 December 2007); https://doi.org/10.1117/12.784706
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KEYWORDS
Source mask optimization

Spectroscopy

Data analysis

Gallium arsenide

Temperature metrology

Associative arrays

Data modeling

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