Carbon nanotube vacuum gauges utilizing long, dissipative tubes

Anupama B. Kaul; Harish M. Manohara

doi:10.1117/12.779570

30 April 2008 Carbon nanotube vacuum gauges utilizing long, dissipative tubes

Anupama B. Kaul, Harish M. Manohara

Proceedings Volume 6959, Micro (MEMS) and Nanotechnologies for Space, Defense, and Security II; 69590F (2008) https://doi.org/10.1117/12.779570
Event: SPIE Defense and Security Symposium, 2008, Orlando, Florida, United States

Abstract

A carbon nanotube-based thermal conductivity vacuum gauge is described which utilizes 5-10 μm long diffusively contacted SWNTs for vacuum sensing. By etching the thermal SiO₂ beneath the tubes and minimizing heat conduction through the substrate, pressure sensitivity was extended toward higher vacuums. The pressure response of unannealed and annealed devices was compared to that of released devices. The released devices showed sensitivity to pressure as low as 1 x 10^-6 Torr. The sensitivity increased more dramatically with power for the released device compared to that of the unreleased device. Low temperature electronic transport measurements of the tubes were suggestive of a thermally activated hopping mechanism where the activation energy for hopping was calculated to be ~ 39 meV.

Citation Download Citation

Anupama B. Kaul and Harish M. Manohara "Carbon nanotube vacuum gauges utilizing long, dissipative tubes", Proc. SPIE 6959, Micro (MEMS) and Nanotechnologies for Space, Defense, and Security II, 69590F (30 April 2008); https://doi.org/10.1117/12.779570

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available