Influence of substrates on the nucleation behaviour of nanocrystalline diamond films

Jinyong Xu; Yiben Xia; Linjun Wang; Jianmin Liu; Jian Huang; Hongyan Pen; Guang Hu; Xuefeng Zhu

doi:10.1117/12.792392

11 March 2008 Influence of substrates on the nucleation behaviour of nanocrystalline diamond films

Jinyong Xu, Yiben Xia, Linjun Wang, Jianmin Liu, Jian Huang, Hongyan Pen, Guang Hu, Xuefeng Zhu

Proceedings Volume 6984, Sixth International Conference on Thin Film Physics and Applications; 698418 (2008) https://doi.org/10.1117/12.792392
Event: Sixth International Conference on Thin Film Physics and Applications, 2007, Shanghai, China

Abstract

Nanocrystalline diamond (NCD) films have been deposited by hot filament chemical vapour deposition (HFCVD) from acetone/hydrogen gas mixtures on a variety of substrates such as silicon wafers and polycrystalline diamond. The influence of the chemical nature of the substrate, the roughness, and the pretreatment of the substrates on the nucleation and the bulk structure of the NCD films are investigated. By means of X-ray diffraction (XRD) and Raman spectroscopy it is shown that the bulk properties of the films are not affected by the status of the substrate although these have a strong influence on the nucleation behaviour.

Citation Download Citation

Jinyong Xu, Yiben Xia, Linjun Wang, Jianmin Liu, Jian Huang, Hongyan Pen, Guang Hu, and Xuefeng Zhu "Influence of substrates on the nucleation behaviour of nanocrystalline diamond films", Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 698418 (11 March 2008); https://doi.org/10.1117/12.792392

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