Preparation of polycrystalline HgI2 films by PVD method under ultrasonic wave

Yaoming Zheng; Weimin Shi; Guangpu Wei; Juan Qin; Sheng Chen; Linjun Wang; Yiben Xia

doi:10.1117/12.792378

11 March 2008 Preparation of polycrystalline HgI₂ films by PVD method under ultrasonic wave

Yaoming Zheng, Weimin Shi, Guangpu Wei, Juan Qin, Sheng Chen, Linjun Wang, Yiben Xia

Proceedings Volume 6984, Sixth International Conference on Thin Film Physics and Applications; 69842Y (2008) https://doi.org/10.1117/12.792378
Event: Sixth International Conference on Thin Film Physics and Applications, 2007, Shanghai, China

Abstract

Highly oriented polycrystalline α-HgI₂ thick films are fabricated by physical vapor deposition method under the conditions of 59KHz ultrasonic wave and relatively lower source temperature of 80°C. The ultrasonic wave is used in the process of physical vapor deposition films preparation for the first time. With the effect of ultrasonic wave, the film quality and the growth rate can be obviously improved. The growth mechanism as well as impacts of ultrasonic wave is also discussed.

Citation Download Citation

Yaoming Zheng, Weimin Shi, Guangpu Wei, Juan Qin, Sheng Chen, Linjun Wang, and Yiben Xia "Preparation of polycrystalline HgI₂ films by PVD method under ultrasonic wave", Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69842Y (11 March 2008); https://doi.org/10.1117/12.792378

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