Effects of oxygen partial pressure on the resistance switching properties of La0.7Ca0.3MnO3 thin films prepared by pulsed laser deposition method

Weidong Yu; Xiaomin Li; Feng Wu; Dashan Shang; Lidong Chen

doi:10.1117/12.792150

11 March 2008 Effects of oxygen partial pressure on the resistance switching properties of La_0.7Ca_0.3MnO₃ thin films prepared by pulsed laser deposition method

Weidong Yu, Xiaomin Li, Feng Wu, Dashan Shang, Lidong Chen

Author Affiliations +

Proceedings Volume 6984, Sixth International Conference on Thin Film Physics and Applications; 698439 (2008) https://doi.org/10.1117/12.792150
Event: Sixth International Conference on Thin Film Physics and Applications, 2007, Shanghai, China

Abstract

The La_0.7Ca_0.3MnO₃ (LCMO) films were prepared by the pulse laser deposition method on Pt/Ti/SiO₂ /Si substrates under the O₂ partial pressures of 0.01Pa, 1Pa, and 10 Pa, respectively. XRD patterns show that LCMO film grown under the O₂ partial pressure of 0.01Pa exhibited good crystallinity and (110) preferred orientation. Due to the strong collision in the plume, the crystal quality of LCMO films grown under 1Pa and 10Pa decreased remarkably. Electrical measurements show that the LCMO films grown under low O₂ partial pressure has stable resistance switching property. The oxygen content but crystallinity is a key factor for the resistance switching property of LCMO film. The lack of oxygen promotes the resistance switching properties of LCMO films.

Citation Download Citation

Weidong Yu, Xiaomin Li, Feng Wu, Dashan Shang, and Lidong Chen "Effects of oxygen partial pressure on the resistance switching properties of La_0.7Ca_0.3MnO₃ thin films prepared by pulsed laser deposition method", Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 698439 (11 March 2008); https://doi.org/10.1117/12.792150

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