The spatial features AlxGa 1-xN/GaN heterostructure

Kira L. Enisherlova; Rafik M. Immamov; I. M. Subbotin; T. F. Rusak; E. M. Temper

doi:10.1117/12.802481

29 April 2008 The spatial features Al_xGa_1-xN/GaN heterostructure

Kira L. Enisherlova, Rafik M. Immamov, I. M. Subbotin, T. F. Rusak, E. M. Temper

Proceedings Volume 7025, Micro- and Nanoelectronics 2007; 702518 (2008) https://doi.org/10.1117/12.802481
Event: Micro- and Nanoelectronics 2007, 2007, Zvenigorod, Russian Federation

Abstract

Complex investigations of the epitaxial layers quality in Al_xGa_(1-x)N/GaN heterostructures grown on sapphire substrates by MBE and MOCVD methods were carried out with using of Double Crystal Diffractometry and optical microscope methods. The mobility and surface concentration of charge carriers were analyzed by means of the Hall effect method. It is shown that the blocks sizes of epitaxial layer grown by MBE method were smaller than separate blocks sizes grown by MOCVD method. On the base of Hall-effect measurements and X-diffractometry investigations it is determined band gap changing from Al-mol content into ALGaN layer. It has been received an experimental dependence of charge carries concentration from Al-mol content into analyzed structures.

Citation Download Citation

Kira L. Enisherlova, Rafik M. Immamov, I. M. Subbotin, T. F. Rusak, and E. M. Temper "The spatial features Al_xGa_1-xN/GaN heterostructure", Proc. SPIE 7025, Micro- and Nanoelectronics 2007, 702518 (29 April 2008); https://doi.org/10.1117/12.802481

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