Fano filter modal analysis based on transferred silicon nanomembranes on flexible substrates

Zexuan Qiang; Li Chen; Hongjun Yang; Huiqing Pang; Zhenqiang Ma; Weidong Zhou

doi:10.1117/12.794072

29 August 2008 Fano filter modal analysis based on transferred silicon nanomembranes on flexible substrates

Zexuan Qiang, Li Chen, Hongjun Yang, Huiqing Pang, Zhenqiang Ma, Weidong Zhou

Proceedings Volume 7031, Active Photonic Crystals II; 703109 (2008) https://doi.org/10.1117/12.794072
Event: NanoScience + Engineering, 2008, San Diego, California, United States

Abstract

We here proposed a new kind of ultra-compact filters based on Fano resonances on patterned single crystalline silicon nanomembranes (SiNM), which were fabricated and transferred onto transparent substrates like PET plastic and glass substrates, using a wet transfer process. The angular and polarization dependent transmission characteristics of the filter are experimentally investigated. The filter transmission characteristics are insensitive to the incident angle and polarization for surface-normal incidence. For other incident angle conditions, the transmission peaks/dips shift, according to the modal dispersion properties, as verified with the simulated modal dispersion curves. Both surface-normal and angle-dependent filter transmission measurement results agree well with the numerical simulations.

Citation Download Citation

Zexuan Qiang, Li Chen, Hongjun Yang, Huiqing Pang, Zhenqiang Ma, and Weidong Zhou "Fano filter modal analysis based on transferred silicon nanomembranes on flexible substrates", Proc. SPIE 7031, Active Photonic Crystals II, 703109 (29 August 2008); https://doi.org/10.1117/12.794072

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