Optical inspection of micro-electromechanical systems

I. A. Sokolov; M. A. Bryushinin; P. M. Karavaev; S. H. Khan; K-T-V. Grattan

doi:10.1117/12.797559

26 September 2008 Optical inspection of micro-electromechanical systems

I. A. Sokolov, M. A. Bryushinin, P. M. Karavaev, S. H. Khan, K-T-V. Grattan

Proceedings Volume 7102, Optical Fabrication, Testing, and Metrology III; 710210 (2008) https://doi.org/10.1117/12.797559
Event: Optical Systems Design, 2008, Glasgow, Scotland, United Kingdom

Abstract

We report the results of utilization of wide-gap photorefractive sillenite crystals as adaptive photodetectors (AP) for optical inspection of micro-electromechanical systems. The operation principle of AP is based on two-wave mixing and non-steady-state photoelectromotive force effects in photorefractive crystals. The results of measurements of small vibration amplitudes and resonant frequencies of the diffusely scattering objects and micro-electromechanical systems are given. The presented adaptive interferometric systems are suitable for industrial applications.

Citation Download Citation

I. A. Sokolov, M. A. Bryushinin, P. M. Karavaev, S. H. Khan, and K-T-V. Grattan "Optical inspection of micro-electromechanical systems", Proc. SPIE 7102, Optical Fabrication, Testing, and Metrology III, 710210 (26 September 2008); https://doi.org/10.1117/12.797559

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