Study on digital closed-loop system of silicon resonant micro-sensor

Yefeng Xu; Mengke He

doi:10.1117/12.806286

13 October 2008 Study on digital closed-loop system of silicon resonant micro-sensor

Yefeng Xu, Mengke He

Proceedings Volume 7127, Seventh International Symposium on Instrumentation and Control Technology: Sensors and Instruments, Computer Simulation, and Artificial Intelligence; 71270W (2008) https://doi.org/10.1117/12.806286
Event: Seventh International Symposium on Instrumentation and Control Technology, 2008, Beijing, China

Abstract

Designing a micro, high reliability weak signal extracting system is a critical problem need to be solved in the application of silicon resonant micro-sensor. The closed-loop testing system based on FPGA uses software to replace hardware circuit which dramatically decrease the system's mass and power consumption and make the system more compact, both correlation theory and frequency scanning scheme are used in extracting weak signal, the adaptive frequency scanning arithmetic ensures the system real-time. The error model was analyzed to show the solution to enhance the system's measurement precision. The experiment results show that the closed-loop testing system based on FPGA has the personality of low power consumption, high precision, high-speed, real-time etc, and also the system is suitable for different kinds of Silicon Resonant Micro-sensor.

Citation Download Citation

Yefeng Xu and Mengke He "Study on digital closed-loop system of silicon resonant micro-sensor", Proc. SPIE 7127, Seventh International Symposium on Instrumentation and Control Technology: Sensors and Instruments, Computer Simulation, and Artificial Intelligence, 71270W (13 October 2008); https://doi.org/10.1117/12.806286

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