Effect on the measurement precision of a multi-pass heterodyne interferometer by an acceleration and compensation method

Hongfang Chen; Jiubin Tan; Zhi Zhong

doi:10.1117/12.819667

31 December 2008 Effect on the measurement precision of a multi-pass heterodyne interferometer by an acceleration and compensation method

Hongfang Chen, Jiubin Tan, Zhi Zhong

Author Affiliations +

Proceedings Volume 7130, Fourth International Symposium on Precision Mechanical Measurements; 713030 (2008) https://doi.org/10.1117/12.819667
Event: Fourth International Symposium on Precision Mechanical Measurements, 2008, Anhui, China

Abstract

To reduce the theoretical measurement error caused by a high acceleration in fast ultra-precision laser heterodyne interferometry, a model is proposed. This model is about how the displacement measurement precision is affected by the acceleration of the measuring prism in a multi-pass heterodyne interferometer. In the model, the integrals of Nv²/c and Nax/c are added on the basis of a conventional heterodyne interferometer model. It shows, that in the conventional model the measurement error increases with increasing measurement acceleration. An error compensation method is proposed, which uses numerical integration to obtain the real time speed and acceleration. Corrected data can be acquired by using an error correction formula. Simulation results show, that the measurement error can be reduced by this method from 10nm to 0.03nm when the displacement of the measuring prism is 500mm and the uniform acceleration of the measuring prism of a double pass interferometer equals g.

Citation Download Citation

Hongfang Chen, Jiubin Tan, and Zhi Zhong "Effect on the measurement precision of a multi-pass heterodyne interferometer by an acceleration and compensation method", Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 713030 (31 December 2008); https://doi.org/10.1117/12.819667

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