Error measuring, modeling, and compensation of precision motion table driven by linear motors

Congpeng Zhang; Xueke Luo; Qiang Liu

doi:10.1117/12.819753

31 December 2008 Error measuring, modeling, and compensation of precision motion table driven by linear motors

Congpeng Zhang, Xueke Luo, Qiang Liu

Proceedings Volume 7130, Fourth International Symposium on Precision Mechanical Measurements; 71305D (2008) https://doi.org/10.1117/12.819753
Event: Fourth International Symposium on Precision Mechanical Measurements, 2008, Anhui, China

Abstract

Precise air-bearing motion table is widely used in the lithography machine and other semiconductor manufacturing equipments. In this paper, a high performance H-type air-bearing XY motion table driven by linear motors was introduced and its positioning error measuring, modeling and compensation were studied. Firstly, the main error sources and types of the motion table were analyzed. Secondly, applying laser-vector-measurement technique, positioning errors in the X and Y directions were measured by laser interferometer. Then the composite error models of three linear motors in the H-type stage were built by different methods, including piecewise linear models, B-spline curve models and artificial nerve network models. According to the structure characteristic, the difference between the one-dimension (1-D) and two-dimension (2-D) error model and compensation effect were studied. Lastly, some error compensation experiments were carried out based on different error models. The experimental results show that positioning error in X and Y directions were decreased to less than 1µm through error correction, which can fulfill the micron level precision requirement in industry, the B-spline model and BP nerve network model had better error forecast ability than the piecewise linear model, and the 2-Derror model has better compensation effect than 1-D model.

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Congpeng Zhang, Xueke Luo, and Qiang Liu "Error measuring, modeling, and compensation of precision motion table driven by linear motors", Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 71305D (31 December 2008); https://doi.org/10.1117/12.819753

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KEYWORDS

Motion models

Nerve

Motion measurement

Error analysis

Interferometers

Lithography

Manufacturing equipment

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