Characterization of inhomogeneous samples by spectroscopic Mueller polarimetry

M. Foldyna; A. De Martino; R. Ossikovski; E. Garcia-Caurel; D. Cattelan; C. Licitra

doi:10.1117/12.804690

4 December 2008 Characterization of inhomogeneous samples by spectroscopic Mueller polarimetry

M. Foldyna, A. De Martino, R. Ossikovski, E. Garcia-Caurel, D. Cattelan, C. Licitra

Proceedings Volume 7140, Lithography Asia 2008; 71400J (2008) https://doi.org/10.1117/12.804690
Event: SPIE Lithography Asia - Taiwan, 2008, Taipei, Taiwan

Abstract

Light depolarization occurs whenever different polarization responses add up incoherently, as it may be the case with inhomogeneous samples. The most convenient technique to characterize such samples is Mueller matrix polarimetry, as it is the only one providing all the relevant information in presence of depolarization. We studied the case of small grating boxes surrounded by bare silicon, in conditions where both the gratings and the substrate were illuminated by the Mueller polarimeter beam. The grating optical response is modeled by using rigorous coupled-waves analysis, and added incoherently to that of the substrate by merely summing the corresponding Mueller matrices. The line width and the depth of the grating as well as the percentage of substrate in irradiated spot area were obtained by fitting the experimental data taken with controlled displacement of the light spot in the boundary region between grating and substrate. Accurate grating parameters could be obtained with the fraction of the spot area within the grating box was larger than 30%. Moreover, these parameters remained relatively constant when this fraction was further decreased to 5%.

Citation Download Citation

M. Foldyna, A. De Martino, R. Ossikovski, E. Garcia-Caurel, D. Cattelan, and C. Licitra "Characterization of inhomogeneous samples by spectroscopic Mueller polarimetry", Proc. SPIE 7140, Lithography Asia 2008, 71400J (4 December 2008); https://doi.org/10.1117/12.804690

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available