Two-photon polymerization for fabrication of three-dimensional micro- and nanostructures over a large area

M. Malinauskas; V. Purlys; M. Rutkauskas; R. Gadonas

doi:10.1117/12.811125

23 February 2009 Two-photon polymerization for fabrication of three-dimensional micro- and nanostructures over a large area

M. Malinauskas, V. Purlys, M. Rutkauskas, R. Gadonas

Author Affiliations +

Proceedings Volume 7204, Micromachining and Microfabrication Process Technology XIV; 72040C (2009) https://doi.org/10.1117/12.811125
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

Two-photon polymerization has emerged as a technology for rapid fabrication of three-dimensional micro-structures with nanoscale resolution. Commonly, a Ti:Sapphire femtosecond laser (operating at 780-800 nm wavelength) working at MHz pulse repetition rate is applied as an irradiation source to photomodify the resin. We present a system for pinpoint two-photon polymerization which utilizes second harmonic (515 nm) of amplified Yb:KGW femtosecond laser working at 312.5 kHz pulse repetition rate. Shorter irradiation wavelength enables one to focus laser beam to a smaller spot. High repetition rate and high average power capacitates rapid fabrication of three-dimensional structures over a large area. Results obtained prove the highest resolution of fabrication to be up to ~100 nm, and reproducible resolution 200 nm. Some micro-structures fabricated rapidly over millimeter area and revealing the specific problems arising at high speed fabrication over large lateral dimensions are presented in this report. Results obtained show the system and technologies applied to be well suitable for future routine 3D structuring over the large area and application of such structures in photonics, micro-optics, micromechanics, microelectronics and cell growth for tissue engineering.

Citation Download Citation

M. Malinauskas, V. Purlys, M. Rutkauskas, and R. Gadonas "Two-photon polymerization for fabrication of three-dimensional micro- and nanostructures over a large area", Proc. SPIE 7204, Micromachining and Microfabrication Process Technology XIV, 72040C (23 February 2009); https://doi.org/10.1117/12.811125

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available