A planar monolithic large size resonant scanning mirror actuated by electromagnetic induction

Luiz C. M. Oliveira; Luiz O. S. Ferreira

doi:10.1117/12.807309

17 November 2008 A planar monolithic large size resonant scanning mirror actuated by electromagnetic induction

Luiz C. M. Oliveira, Luiz O. S. Ferreira

Proceedings Volume 7266, Optomechatronic Technologies 2008; 726606 (2008) https://doi.org/10.1117/12.807309
Event: International Symposium on Optomechatronic Technologies, 2008, San Diego, California, United States

Abstract

A new design of resonant scanning mirror actuated by electromagnetic induction is presented. It is a planar device that was manufactured from 0.5 mm thick phosphor bronze by batch photofabrication. The monolithic mechanical structure have a frame, tree torsion bars and two rotors. Folded torsion bars connect the frame to the rotors, and a straight torsion bar interconnects both rotors. One rotor is devoted to the armature (moving coil), and the other rotor carries the mirror. There is a hole in the armature where a branch of the actuating magnetic core (stator) passes through, carrying the magnetic flux generated by an excitation coil of the stator. The efficiency on converting electric power to mechanical motion was increased two orders of magnitude from a previously published inductive planar device (0.005 W/deg against 2.2 W/deg). A prototype measuring 69 x 49 mm² oscillating at 64.4 Hz presented deflection angle of 12°_pp, and a quality factor Q of 200. A mathematical model was derived and a design procedure was developed. The results shown that this device has potential to replace conventional resonant scanners on high-aperture optical systems or high-power laser applications.

Citation Download Citation

Luiz C. M. Oliveira and Luiz O. S. Ferreira "A planar monolithic large size resonant scanning mirror actuated by electromagnetic induction", Proc. SPIE 7266, Optomechatronic Technologies 2008, 726606 (17 November 2008); https://doi.org/10.1117/12.807309

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available