IAD-Si coatings on RB-SiC space mirrors for ultrasmooth surfaces

Lingdi Xu; Xuejun Zhang; Ruigang Li; Feng Zhang; Xu Wang

doi:10.1117/12.830814

20 May 2009 IAD-Si coatings on RB-SiC space mirrors for ultrasmooth surfaces

Lingdi Xu, Xuejun Zhang, Ruigang Li, Feng Zhang, Xu Wang

Proceedings Volume 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 72820W (2009) https://doi.org/10.1117/12.830814
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

To eliminate surface limitation caused by Silicon impurity in RB-SiC space mirrors, a relatively thick Si film is deposited on well finished RB-SiC substrate by a new process-ion assisted depositing (IAD) to provide a better polishable surface. Testing results of IAD-Si properties are provided, showing that the amorphous film has great thermal shock resistance. Then, polishing experiments on 10±0.5μm thick IAD-Si layers are accomplished focusing on smoother surface. Surface figure and micro-roughness of the coating after polished reach 0.026λ RMS (λ=0.6328nm) and less than 0.5nm RMS respectively. Moreover, reflectivity of IAD-Si polished surface with reflective films increases higher than 4.5% than that of RB-SiC in 360-1100nm. High reflectivity and desirable thermal property make IAD-Si an attractive coating material for RB-SiC space mirrors.

Citation Download Citation

Lingdi Xu, Xuejun Zhang, Ruigang Li, Feng Zhang, and Xu Wang "IAD-Si coatings on RB-SiC space mirrors for ultrasmooth surfaces", Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 72820W (20 May 2009); https://doi.org/10.1117/12.830814

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