Study on interferometric measurements of a high accuracy laser-diode interferometer with real-time displacement measurement and its calibration

Yi Zeng; Guotian He

doi:10.1117/12.828822

20 May 2009 Study on interferometric measurements of a high accuracy laser-diode interferometer with real-time displacement measurement and its calibration

Yi Zeng, Guotian He

Author Affiliations +

Proceedings Volume 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 72834C (2009) https://doi.org/10.1117/12.828822
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

In view of low precision of existing semiconductor laser micro displacement real-time interference measuring instrument and the difficulty to adjust, this article proposes a normalized technology and demarcation technology, develops one kind of semiconductor laser vibration real-time interference measuring instrument which has the adjustment function, analyzes its real-time surveys principle and demarcation method. This interferometer carries on processing using normalized electric circuit and real-time phase discriminator to process interference signals, and has realized high accuracy real-time examination of micro displacement. Its measurement result has nothing to do with system parameter luminous intensity, initial light path difference, electric circuit enlargement factor, modulation depth and Bessell function value. Demarcation technology has been carried on to the interferometer, which further increases the measuring accuracy of interferometer. Experimental result confirms the feasibility of this interferometer and its measuring accuracy surpasses 3.89nm.The survey time is smaller than 50μs.

Citation Download Citation

Yi Zeng and Guotian He "Study on interferometric measurements of a high accuracy laser-diode interferometer with real-time displacement measurement and its calibration", Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72834C (20 May 2009); https://doi.org/10.1117/12.828822

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