Thermo-optic and elasto-optic tuning of silicon nanowires

J. Amthor; O. Horn; T. Lipka; J. Müller

doi:10.1117/12.821698

20 May 2009 Thermo-optic and elasto-optic tuning of silicon nanowires

J. Amthor, O. Horn, T. Lipka, J. Müller

Proceedings Volume 7366, Photonic Materials, Devices, and Applications III; 73661Y (2009) https://doi.org/10.1117/12.821698
Event: SPIE Europe Microtechnologies for the New Millennium, 2009, Dresden, Germany

Abstract

In this work a thermo-optic switch with very low power consumption of less than 1 mW is presented. The switch consists of a Mach-Zehnder-Interferometer whose arms are placed on free-standing SiO₂-membrane cantilevers. The waveguides are monomode nanowires fabricated by DUV-contact lithography having losses of 2 dB/cm. Additionally, a membrane-system to tune the nanowires elasto-optically is shown.

Citation Download Citation

J. Amthor, O. Horn, T. Lipka, and J. Müller "Thermo-optic and elasto-optic tuning of silicon nanowires", Proc. SPIE 7366, Photonic Materials, Devices, and Applications III, 73661Y (20 May 2009); https://doi.org/10.1117/12.821698

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