Critical dimension measurements using a 193 nm scatterfield microscope

R. Quintanilha; Y. Sohn; B. M. Barnes; L. Howard; R. Silver

doi:10.1117/12.827679

29 June 2009 Critical dimension measurements using a 193 nm scatterfield microscope

R. Quintanilha, Y. Sohn, B. M. Barnes, L. Howard, R. Silver

Proceedings Volume 7390, Modeling Aspects in Optical Metrology II; 73900S (2009) https://doi.org/10.1117/12.827679
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

We have developed a set of techniques, referred to as scatterfield microscopy, in which the illumination is engineered at a sufficiently large Conjugate Back Focal Plane (CBFP) of the microscope. A primary advance of our new scatterfield microscope is the use of 193 nm excimer laser light. Sophisticated configurations have been implemented to allow measurement of both the image plane and the Fourier plane using full-field and angleresolved illumination. Here, the microscope is primarily used in an angular mode by engineering the CBFP to enable angle-resolved scatterometer measurements with a numerical aperture (NA) range from 0.08 to 0.74. Electromagnetic models - the Finite Element Method (FEM) and the Modal Method of Fourier Expansion (MMFE) were used to model the experimental light scattering and evaluate the sensitivity to the geometrical parameters and correlations. In addition, experimental results obtained on line gratings for unpolarized illumination will be presented and discussed. measurements.

Citation Download Citation

R. Quintanilha, Y. Sohn, B. M. Barnes, L. Howard, and R. Silver "Critical dimension measurements using a 193 nm scatterfield microscope", Proc. SPIE 7390, Modeling Aspects in Optical Metrology II, 73900S (29 June 2009); https://doi.org/10.1117/12.827679

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available