Theoretical model and calibration experiment for BioCD

Weili An; Feng Ying; Chen Han

doi:10.1117/12.837980

23 November 2009 Theoretical model and calibration experiment for BioCD

Weili An, Feng Ying, Chen Han

Proceedings Volume 7508, 2009 International Conference on Optical Instruments and Technology: Advanced Sensor Technologies and Applications; 75080E (2009) https://doi.org/10.1117/12.837980
Event: International Conference on Optical Instrumentation and Technology, 2009, Shanghai, China

Abstract

The theoretical model and calibration experiment of biological compact disc sensor (BioCD) is presented. BioCD is a new kind of label-free optical biosensor based on Interferometry to detect immobilized biomolecules with high speed, high sensitivity and high-throughput. Output signal theoretical expressions were deduced. The influences of illuminating beam Gauss parameter and lens aberration to detection sensitivity were simulated. Simulation result showed that Gauss parameter as well as aberration parameter increase will reduce detection sensitivity. Then BioCD experimental platform was setup, sensor arrays for calibration was fabricated using reactive ion etching technology on silicon substrate. Experimental results indicated that detection sensitivity can achieve 15mV/nm.

Citation Download Citation

Weili An, Feng Ying, and Chen Han "Theoretical model and calibration experiment for BioCD", Proc. SPIE 7508, 2009 International Conference on Optical Instruments and Technology: Advanced Sensor Technologies and Applications, 75080E (23 November 2009); https://doi.org/10.1117/12.837980

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