Paper
20 November 2009 1-dimension nano-material-based flexible device
Xing Yang, Zhaoying Zhou
Author Affiliations +
Proceedings Volume 7510, 2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications; 75100K (2009) https://doi.org/10.1117/12.839864
Event: International Conference on Optical Instrumentation and Technology, 2009, Shanghai, China
Abstract
1D nano-material-based flexible devices has attracted considerable attention owing to the growing need of the high-sensitivity flexible sensor, portable consumer electronics etc.. In this paper, the 1D nano-materials-based flexible device on polyimide substrate was proposed. The bottom-up and top-down combined process were used for constructing the ZnO nanowire and the CNT-based flexible devices. Their electrical characteristics were also investigated. The measurement results demonstrate that the flexible device covered with a layer of Al2O3 has good ohm electrical contact behavior between the nano-material and micro-electrodes. The proposed 1D nano-material-based flexible device shows the application potential in the sensing fields.
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Xing Yang and Zhaoying Zhou "1-dimension nano-material-based flexible device", Proc. SPIE 7510, 2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications, 75100K (20 November 2009); https://doi.org/10.1117/12.839864
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KEYWORDS
Electrodes

Nanowires

Zinc oxide

Dielectrophoresis

Sensors

Nanolithography

Carbon nanotubes

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