Field-emission SEM characterization of novel ZnO thin films grown by magnetron sputtering on the different substrates

Tangchao Peng; Xiangheng Xiao; Changzhong Jiang

doi:10.1117/12.843429

12 October 2009 Field-emission SEM characterization of novel ZnO thin films grown by magnetron sputtering on the different substrates

Tangchao Peng, Xiangheng Xiao, Changzhong Jiang

Author Affiliations +

Proceedings Volume 7518, Photonics and Optoelectronics Meetings (POEM) 2009: Solar Cells, Solid State Lighting, and Information Display Technologies; 75180C (2009) https://doi.org/10.1117/12.843429
Event: Photonics and Optoelectronics Meetings 2009, 2009, Wuhan, China

Abstract

Zinc oxide is a direct, wide bandgap semiconductor material with many promising properties for blue/UV optoelectronics, transparent electronics, spintronic devices and sensor applications. In this work, zinc oxide films were deposited by RF magnetron sputtering on different substrates. The images of field-emission SEM are used to analyse the structures of the samples, and some novel structures of the ZnO thin films grown on quartz glass and normal glass substrate are found. The x-ray diffraction is used to analyse the grain structure of these samples, it is shown that films grow mainly with the hexagonal c-axis perpendicular to the substrate surface.

Citation Download Citation

Tangchao Peng, Xiangheng Xiao, and Changzhong Jiang "Field-emission SEM characterization of novel ZnO thin films grown by magnetron sputtering on the different substrates", Proc. SPIE 7518, Photonics and Optoelectronics Meetings (POEM) 2009: Solar Cells, Solid State Lighting, and Information Display Technologies, 75180C (12 October 2009); https://doi.org/10.1117/12.843429

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