Preparation of BST ferroelectric thin films by pulsed laser deposition for infrared sensor

Long Zeng; Gang Sheng; Zhenlun Zhang; Pingxiong Yang

doi:10.1117/12.840396

12 October 2009 Preparation of BST ferroelectric thin films by pulsed laser deposition for infrared sensor

Long Zeng, Gang Sheng, Zhenlun Zhang, Pingxiong Yang

Proceedings Volume 7518, Photonics and Optoelectronics Meetings (POEM) 2009: Solar Cells, Solid State Lighting, and Information Display Technologies; 75180U (2009) https://doi.org/10.1117/12.840396
Event: Photonics and Optoelectronics Meetings 2009, 2009, Wuhan, China

Abstract

Barium strontium titanate (Ba1-xSrxTiO3) shows great potential in optical device applications, especially in infrared uncooled focal plane arrays (UFPAs) fabrication. In this paper, Ba0.5Sr0.5TiO3 ferroelectric thin films were successfully deposited on different substrates by pulsed laser deposition (PLD) with an aim to fabricate dielectric bolometer type infrared (IR) sensor. The microstructure, crystalline characterization and surface morphology of the film were studied by XRD pattern and Atomic Force Microscope (AFM). The fabricated thin films show a similar perovskite structure, have evenly distributed grains and dense, crack-free surface. The dielectric properties and ferroelectric properties of the films are also studied after deposition of the top Pt electrodes. Results show that the film has fine dielectric and ferroelectric properties and could be used for infrared sensor fabrication. Buffer layer effect on film properties is also discussed. The use of different buffer layers could strongly influence the film performance. As in optical device applications, the buffer layer effect should be considered in film fabrication.

Citation Download Citation

Long Zeng, Gang Sheng, Zhenlun Zhang, and Pingxiong Yang "Preparation of BST ferroelectric thin films by pulsed laser deposition for infrared sensor", Proc. SPIE 7518, Photonics and Optoelectronics Meetings (POEM) 2009: Solar Cells, Solid State Lighting, and Information Display Technologies, 75180U (12 October 2009); https://doi.org/10.1117/12.840396

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