Development of EUV resist for 22nm half pitch and beyond

Ken Maruyama; Makoto Shimizu; Yuuki Hirai; Kouta Nishino; Tooru Kimura; Toshiyuki Kai; Kentaro Goto; Shalini Sharma

doi:10.1117/12.846332

20 March 2010 Development of EUV resist for 22nm half pitch and beyond

Ken Maruyama, Makoto Shimizu, Yuuki Hirai, Kouta Nishino, Tooru Kimura, Toshiyuki Kai, Kentaro Goto, Shalini Sharma

Proceedings Volume 7636, Extreme Ultraviolet (EUV) Lithography; 76360T (2010) https://doi.org/10.1117/12.846332
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States

Abstract

In order to achieve targeted resist performance for EUV in practical applications, we have developed new materials such as molecular glass (MG), PAG, and acid amplifiers (AA). Protected NORIA, a molecular glass, was examined for extending resolution limits. The resist with protected NORIA showed 22 nm hp resolutions under EUV exposure. PAG acid diffusion effect on LWR was also investigated. It was found that acid diffusion control was one of the most important factors for LWR improvement. To improve sensitivity, application of AA (acid amplifier) was investigated. The resist with AA gained 25% sensitivity improvement over the original formulation. Elemental technologies for major progress of EUV resist were made.

Citation Download Citation

Ken Maruyama, Makoto Shimizu, Yuuki Hirai, Kouta Nishino, Tooru Kimura, Toshiyuki Kai, Kentaro Goto, and Shalini Sharma "Development of EUV resist for 22nm half pitch and beyond", Proc. SPIE 7636, Extreme Ultraviolet (EUV) Lithography, 76360T (20 March 2010); https://doi.org/10.1117/12.846332

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available