Study on acid diffusion length effect with PAG-blended system and anion-bounded polymer system

Shinji Tarutani; Hideaki Tsubaki; Hidenori Takahashi; Takayuki Itou; Kentaro Matsunaga; Gousuke Shiraishi; Toshiro Itani

doi:10.1117/12.846033

30 March 2010 Study on acid diffusion length effect with PAG-blended system and anion-bounded polymer system

Shinji Tarutani, Hideaki Tsubaki, Hidenori Takahashi, Takayuki Itou, Kentaro Matsunaga, Gousuke Shiraishi, Toshiro Itani

Author Affiliations +

Proceedings Volume 7639, Advances in Resist Materials and Processing Technology XXVII; 76391O (2010) https://doi.org/10.1117/12.846033
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States

Abstract

Fundamental studies on polymer bounded PAG and polymer - PAG blend type were carried out with the viewpoint of dissolution property, lithographic performance, and blur. These materials were prepared to be able to directly compare and to discuss the difference between blend and bounded PAG, with different PAG loading amount. Dissolution property revealed the clear difference of these materials tendency to the PAG loading amount variation. Lithographic performance difference corresponds to the dissolution property difference, and there found the strategy to improve lithographic performance with polymer bounded PAG type resist. Blur study suggests the advantage in polymer bounded PAG in resolution.

Citation Download Citation

Shinji Tarutani, Hideaki Tsubaki, Hidenori Takahashi, Takayuki Itou, Kentaro Matsunaga, Gousuke Shiraishi, and Toshiro Itani "Study on acid diffusion length effect with PAG-blended system and anion-bounded polymer system", Proc. SPIE 7639, Advances in Resist Materials and Processing Technology XXVII, 76391O (30 March 2010); https://doi.org/10.1117/12.846033

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available