Process sizing aware flow for yield calculation

Chi-Min Yuan

doi:10.1117/12.846607

2 April 2010 Process sizing aware flow for yield calculation

Chi-Min Yuan

Proceedings Volume 7641, Design for Manufacturability through Design-Process Integration IV; 76410E (2010) https://doi.org/10.1117/12.846607
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States

Abstract

Layout sizing in the mask preparation step is commonly used on critical layers to improve printing process windows. The current flow of yield calculation based on critical areas of a layout typically does not take into account this sizing step. In this paper, we propose a new and simple flow that accounts for the sizing to improve the accuracy of yield calculation. We compare the calculated results using the current and sizing-aware flow to demonstrate the differences. We also show that results from the sizing-aware flow better match the calculated circuit switching power, which already takes into account this sizing step.

Citation Download Citation

Chi-Min Yuan "Process sizing aware flow for yield calculation", Proc. SPIE 7641, Design for Manufacturability through Design-Process Integration IV, 76410E (2 April 2010); https://doi.org/10.1117/12.846607

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