Design of a large area 2D microscopy image measurement system

Xin Li; Yurong Chen; Shenghuai Wang; Tiebang Xie

doi:10.1117/12.865512

11 October 2010 Design of a large area 2D microscopy image measurement system

Xin Li, Yurong Chen, Shenghuai Wang, Tiebang Xie

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 765630 (2010) https://doi.org/10.1117/12.865512
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

The acquisition, identification and evaluation of microscopy image is one of the most popular and important technology in basic research. The field and resolution of traditional microscopy are mutually restricted. For enlarging field, one method is to design microscopy with large numerical aperture and large field by structure. But the field can't be too large because of structure limit. The other is to stitch images. But the stitching of most microscopy is based on features of images with a low accuracy displacement mechanism. The stitching accuracy is not high and even the stitching can't be implemented because of discrimination errors. So a large area stitching image is difficult to obtain. To address this issue, a type of large area, seamless and featureless microscopy image stitching measurement system has been designed in this paper. This system is based on compound optical microscopy system and 3D precision displacement system with large travel, nanometer level and displacement measurement. A mathematic model for CCD calibration and calculation of angles between CCD and level worktables is established and the problem that the CCD calibration and angle measurement of general measurement system depend on external equipments is solved. A non-orthogonal worktable moving strategy is set up for the seamless stitching measurement of optical microscopy image measurement, which reduces the cost of stitching and enlarges the measurement field of this method. Therefore the problem of this method, which the lateral resolution and the measurement filed are restricted to the numerical aperture of objective, is solved.

Citation Download Citation

Xin Li, Yurong Chen, Shenghuai Wang, and Tiebang Xie "Design of a large area 2D microscopy image measurement system", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 765630 (11 October 2010); https://doi.org/10.1117/12.865512

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