Effects of different frequency error of mirror surface on the system imaging quality

Peiji Guo; Xiaoyong Wang

doi:10.1117/12.865174

11 October 2010 Effects of different frequency error of mirror surface on the system imaging quality

Peiji Guo, Xiaoyong Wang

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 76563R (2010) https://doi.org/10.1117/12.865174
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

Based on primary mirror having the same surface error RMS 0.025λ(λ=0.6328μm), the effect of mirror surface error of different frequency on optical imaging system transfer function (MTF) and system energy concentration were calculated and studied, research result shows that the surface periodic error of X direction has no effect on the MTF of X direction, the surface periodic error of Y direction has no effect on the MTF of Y direction, and the direction of surface periodic error almost has no effect on average MTF of all field, the average spot diameter(80% of energy) and the average MTF in Nyquist spatial frequency of all field change with the frequency of mirror surface error periodically, but don't increase or decrease with the frequency of mirror surface error. Research result also shows that the periodicity of average MTF in Nyquist spatial frequency is due to that the change of MTF has periodicity in pass band with the frequency of surface error, and the change frequency of MTF in pass band increases with the frequency of mirror surface error, but amplitude almost is same, so the same RMS of primary mirror surface error almost has the same effect on the performance of the imaging system, and the effect is irrelevant to the distribution frequency of surface error, the RMS of mirror surface error decided the influence of mirror surface error to the performance of imaging system, and can be used as a main parameter of evaluating optical surface error quality of optical imaging system.

Citation Download Citation

Peiji Guo and Xiaoyong Wang "Effects of different frequency error of mirror surface on the system imaging quality", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76563R (11 October 2010); https://doi.org/10.1117/12.865174

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KEYWORDS

Mirrors

Modulation transfer functions

Imaging systems

Surface finishing

Error analysis

Spatial frequencies

Optical imaging

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