Small pixel a-Si/a-SiGe bolometer focal plane array technology at L-3 Communications

Charles M. Hanson; Sameer K. Ajmera; John Brady; Thomas Fagan; William McCardel; Diane Morgan; Tom Schimert; A. J. Syllaios; Michael F. Taylor

doi:10.1117/12.852511

28 July 2010 Small pixel a-Si/a-SiGe bolometer focal plane array technology at L-3 Communications

Charles M. Hanson, Sameer K. Ajmera, John Brady, Thomas Fagan, William McCardel, Diane Morgan, Tom Schimert, A. J. Syllaios, Michael F. Taylor

Author Affiliations +

Proceedings Volume 7660, Infrared Technology and Applications XXXVI; 76600R (2010) https://doi.org/10.1117/12.852511
Event: SPIE Defense, Security, and Sensing, 2010, Orlando, Florida, United States

Abstract

Recent developments in low-noise, high temperature coefficient of resistance (TCR) amorphous silicon and amorphous silicon germanium material have led to the development of uncooled focal plane arrays, with TCR in the range 3.2%/K to 3.9%/K, which has been leveraged in the small pixel FPA development at L-3 EOS. In the 17μm pixel technology node at present, 1024x768, 640×480, and 320x240 FPAs have thus far been developed. All three formats employ waferlevel vacuum packaging, with the 1024x768 representing the largest format uncooled FPA wafer-level packaged to date. FPA results from all three formats will be discussed and images will be presented.

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Charles M. Hanson, Sameer K. Ajmera, John Brady, Thomas Fagan, William McCardel, Diane Morgan, Tom Schimert, A. J. Syllaios, and Michael F. Taylor "Small pixel a-Si/a-SiGe bolometer focal plane array technology at L-3 Communications", Proc. SPIE 7660, Infrared Technology and Applications XXXVI, 76600R (28 July 2010); https://doi.org/10.1117/12.852511

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