Studies on evaluating and removing subsurface damage on the ground surface of CLEARCERAM-Z HS

Hiroshi Akitaya; Takuya Yamashita; Norio Ohshima; Masanori Iye; Toshinori Maihara; Hitoshi Tokoro; Keisuke Takahashi

doi:10.1117/12.856645

22 July 2010 Studies on evaluating and removing subsurface damage on the ground surface of CLEARCERAM-Z HS

Hiroshi Akitaya, Takuya Yamashita, Norio Ohshima, Masanori Iye, Toshinori Maihara, Hitoshi Tokoro, Keisuke Takahashi

Proceedings Volume 7739, Modern Technologies in Space- and Ground-based Telescopes and Instrumentation; 77392E (2010) https://doi.org/10.1117/12.856645
Event: SPIE Astronomical Telescopes + Instrumentation, 2010, San Diego, California, United States

Abstract

We evaluated depth of subsurface damage on a ground surface of the ultra low expansion glass-ceramics CLEARCERAMR®-Z HS (CC-Z HS) by Ohara Inc., which is one of the candidates for material for segmented mirrors of the Thirty Meter Telescope. We made polishing spots of Magnetorheological Finishing on the ground surface of CC-Z HS and measured exposed subsurface damage features on the spot surface. We also studied on hydrofluoric acid etching of the CC-Z HS ground surface, which is expected to be an effective method to remove a subsurface damage layer compared with time-consuming polishing. We etched small ground surfaces of CC-Z HS and evaluated its uniformity.

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Hiroshi Akitaya, Takuya Yamashita, Norio Ohshima, Masanori Iye, Toshinori Maihara, Hitoshi Tokoro, and Keisuke Takahashi "Studies on evaluating and removing subsurface damage on the ground surface of CLEARCERAM-Z HS", Proc. SPIE 7739, Modern Technologies in Space- and Ground-based Telescopes and Instrumentation, 77392E (22 July 2010); https://doi.org/10.1117/12.856645

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KEYWORDS

Surface finishing

Magnetorheological finishing

Etching

Polishing

Segmented mirrors

Thirty Meter Telescope

HF etching

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