Paper
23 August 2010 Nanoimprinted photonic devices
Jayan Thomas, Palash Gangopadhyay, Ramon Munoz, N. Peyghambarian
Author Affiliations +
Abstract
We introduce a simple yet efficient approach for nanoimprinting sub-50 nm dimensions starting from a low molecular weight plasticized polymer melt. This technique enabled us to successfully imprint versatile large area nanopatterns with high degrees of fidelity and rational control over the residual layers. The key advantage is its reliability in printing versatile nanostructures and nanophotonic devices doped with organic dyes owing to its low processing temperature. Since nanopatterns can be fabricated easily at low costs, this approach offers an easy pathway for achieving excellent nanoimprinted structures for a variety of photonic, electronic and biological research and applications.
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Jayan Thomas, Palash Gangopadhyay, Ramon Munoz, and N. Peyghambarian "Nanoimprinted photonic devices", Proc. SPIE 7788, Polymer Optics Design, Fabrication, and Materials, 778802 (23 August 2010); https://doi.org/10.1117/12.861819
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KEYWORDS
Polymers

Nanostructures

Nanoimprint lithography

Photonic devices

Nanolithography

Composites

Fabrication

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