Off-axis reflection digital holographic microscopy for micron structure tomography measurement

Guofeng Cheng; Zhuqing Jiang; Dayong Wang; Maoluan Ding; Huakun Cui

doi:10.1117/12.870092

17 November 2010 Off-axis reflection digital holographic microscopy for micron structure tomography measurement

Guofeng Cheng, Zhuqing Jiang, Dayong Wang, Maoluan Ding, Huakun Cui

Proceedings Volume 7848, Holography, Diffractive Optics, and Applications IV; 78482E (2010) https://doi.org/10.1117/12.870092
Event: Photonics Asia 2010, 2010, Beijing, China

Abstract

The single wavelength off-axis reflection digital holographic microscopy (DHM) can be applied in micron optical tomography measurement through the pre-magnification method. The pre-magnifying surface profile of the object is imaged by the lens placed in front of the object to be measured, and then is recorded by the CCD camera. The Reconstructed image can be got through Fresnel Diffraction calculation, the 3D surface shape information of the object was shown after the phase filtering and unwrapping process to the reconstruction image. The result in this experiment proves that off-axis reflection digital holographic microscopy can be applied to actual measurement of micron object, to achieve the tomography without touching or breaking the object.

Citation Download Citation

Guofeng Cheng, Zhuqing Jiang, Dayong Wang, Maoluan Ding, and Huakun Cui "Off-axis reflection digital holographic microscopy for micron structure tomography measurement", Proc. SPIE 7848, Holography, Diffractive Optics, and Applications IV, 78482E (17 November 2010); https://doi.org/10.1117/12.870092

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