MEMS-based tunable Fabry-Perot filters

Neelam Gupta; Songsheng Tan; Dennis R. Zander

doi:10.1117/12.881649

12 May 2011 MEMS-based tunable Fabry-Perot filters

Neelam Gupta, Songsheng Tan, Dennis R. Zander

Proceedings Volume 8032, Next-Generation Spectroscopic Technologies IV; 803205 (2011) https://doi.org/10.1117/12.881649
Event: SPIE Defense, Security, and Sensing, 2011, Orlando, Florida, United States

Abstract

We present a miniature tunable Fabry-Perot (FP) filter development effort based on using MEMS technology to fabricate and package it. The tunable filter development is intended to cover spectral regions from the visible to the longwave infrared by developing a number of different filters each operating over a different wavelength region. The main objective of developing such miniature tunable filters is to use each in a miniature hyperspectral imager by placing it in front of a commercial focal plane array with a suitable optical train. Such a miniature tunable device has many more applications, i.e., in developing tunable sources. Recently, we succeeded in fabricating some operational FP filters operating in the visible/near infrared (VIS/NIR) wavelength region from 400 to 800 nm. The filter design uses one fixed mirror and the second mirror moves using an electrostatic force. The device with a dimension of 18x24 mm² is composed of two parts: one fixed Ag mirror and one electrostatically moveable Ag mirror. Commercially available thin quartz wafer with low total thickness variation (TTV) was used as the substrate for each of these two parts. Au bumps were deposited in both parts in order to control the initial air gap distance and Au-Au bonding was used to bond two parts together. This paper will describe the device design considerations, the fabrication process, the effect of electrostatic force, the optical spectral measurements, and present test results.

Citation Download Citation

Neelam Gupta, Songsheng Tan, and Dennis R. Zander "MEMS-based tunable Fabry-Perot filters", Proc. SPIE 8032, Next-Generation Spectroscopic Technologies IV, 803205 (12 May 2011); https://doi.org/10.1117/12.881649

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available