Paper
24 May 2011 Extremely lightweight x-ray optics based on thin substrates
R. Hudec, J. Sik, M. Lorenc, L. Pina, V. Marsikova, M. Mika, A. Inneman, M. Skulinova
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Abstract
We report on recent progress with development of astronomical X-ray optics based on bent Si wafers. Recent efforts with Si wafers have been focused on new forming technologies such as method of deposition of thin layers. The role of substrates quality in performance of final mirror arrays, as required by large future space X-ray astronomy experiments was also studied.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. Hudec, J. Sik, M. Lorenc, L. Pina, V. Marsikova, M. Mika, A. Inneman, and M. Skulinova "Extremely lightweight x-ray optics based on thin substrates", Proc. SPIE 8076, EUV and X-Ray Optics: Synergy between Laboratory and Space II, 807604 (24 May 2011); https://doi.org/10.1117/12.890516
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KEYWORDS
Semiconducting wafers

Silicon

X-ray optics

Semiconductors

Wafer-level optics

X-ray telescopes

Surface finishing

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