Shape Measurement Of Deep Aspheric Optical Surfaces By Radial Shear Interferometry

T. Honda; J. Huang; J. Tsujiuchi; J. C. Wyant

doi:10.1117/12.967294

1 January 1987 Shape Measurement Of Deep Aspheric Optical Surfaces By Radial Shear Interferometry

T. Honda, J. Huang, J. Tsujiuchi, J. C. Wyant

Proceedings Volume 0813, Optics and the Information Age; (1987) https://doi.org/10.1117/12.967294
Event: 14th Congress of the International Commission for Optics, 1987, Quebec, Canada

Abstract

Nowadays, mirrors and lenses are used that have surfaces with a deep asphericity of rotational symmetry, and there is a strong need for the precise shape measurement of these surfaces. It is not easy to measure this kind of surface by using the common interferometric method becatm the fringes are too dense to be observed. For decreasing the fringe number, a radial shear method1 is adopted.

Citation Download Citation

T. Honda, J. Huang, J. Tsujiuchi, and J. C. Wyant "Shape Measurement Of Deep Aspheric Optical Surfaces By Radial Shear Interferometry", Proc. SPIE 0813, Optics and the Information Age, (1 January 1987); https://doi.org/10.1117/12.967294

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