Combination of a micro-lens multi-spot generator with a galvanometer scanner for flexible parallel micromachining of silicon

Maik Zimmermann; Michael Schmidt

doi:10.1117/12.892679

21 September 2011 Combination of a micro-lens multi-spot generator with a galvanometer scanner for flexible parallel micromachining of silicon

Maik Zimmermann, Michael Schmidt

Author Affiliations +

Proceedings Volume 8130, Laser Beam Shaping XII; 81300O (2011) https://doi.org/10.1117/12.892679
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

Multi focus optics are used for parallelizing production and for large-scale material processing. These elements split the beam into a periodic spot pattern with a defined grid and spot size. The challenge lies in the generation of a homogeneous envelope. Additionally the demand for flexible systems for an in-process changing of optical properties increases. Different components for multi spot generation like diffractive optical elements or micro lens arrays have been investigated. Diffractive optical elements offer large degree of freedom in the generation of arbitrary intensity distributions. In the paper we demonstrate the use of a diffractive element in combination with a multi spot generator. Within the paper we present the investigation of a micro lens array in a fly's eye condenser setup for the generation of homogeneous spot patterns. The multi spot generator is combined with a galvanometer scanner for forming an arbitrary shaped laser beam into a spot-, ring or arbitrary array pattern. We show the principal functionality of the multi-spot generator. Furthermore constrains of this setup are demonstrated. The multi spot scanner is used for micro structuring of silicon with a nanosecond diode pumped solid state laser. The ablation rate and structure quality are compared to single spot processing.

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Maik Zimmermann and Michael Schmidt "Combination of a micro-lens multi-spot generator with a galvanometer scanner for flexible parallel micromachining of silicon", Proc. SPIE 8130, Laser Beam Shaping XII, 81300O (21 September 2011); https://doi.org/10.1117/12.892679

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