High-speed triangulation-based point sensing using phase detection

Kevin Harding

doi:10.1117/12.894906

14 September 2011 High-speed triangulation-based point sensing using phase detection

Kevin Harding

Proceedings Volume 8133, Dimensional Optical Metrology and Inspection for Practical Applications; 81330B (2011) https://doi.org/10.1117/12.894906
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

Triangulation sensors have been in wide use for many years. Most point sensors use a laser spot, which is detected using either a lateral effect photodiode or a linear detector array. The centroid of the spot is used to determine the range using triangulation. On many engineered surfaces, this spot image may suffer from speckle, surface texture, or other issues that limit the ability to repeatably measure the centroid. Many analysis means, such as fitting of the spot, zero crossing, and averaging methods have been tried to make the sensor more robust to surface influenced noise. This paper will present a system using a split image and phase detection to obtain the range. The speed of the sensor is gained by using simple point photodiodes and a moire effect to obtain the phase measurement. The paper will discuss the pros and cons of this approach, and show results on untreated metal parts.ear)

Citation Download Citation

Kevin Harding "High-speed triangulation-based point sensing using phase detection", Proc. SPIE 8133, Dimensional Optical Metrology and Inspection for Practical Applications, 81330B (14 September 2011); https://doi.org/10.1117/12.894906

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