Micromachined Silicon Periodic Structures For Millimeter- And Submillimeter-Wave Applications

L. J. Cheng; G. T. Crotty; J. Farhoomand; K. M. Koliwad; H. M. Pickett

doi:10.1117/12.941740

9 February 1987 Micromachined Silicon Periodic Structures For Millimeter- And Submillimeter-Wave Applications

L. J. Cheng, G. T. Crotty, J. Farhoomand, K. M. Koliwad, H. M. Pickett

Proceedings Volume 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III; (1987) https://doi.org/10.1117/12.941740
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

The feasibility of fabricating periodic structures using silicon micromachining for millimeter-and submillimeter-wave applications is investigated. Diffraction gratings and dichroic filters are fabricated and tested.

Citation Download Citation

L. J. Cheng, G. T. Crotty, J. Farhoomand, K. M. Koliwad, and H. M. Pickett "Micromachined Silicon Periodic Structures For Millimeter- And Submillimeter-Wave Applications", Proc. SPIE 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III, (9 February 1987); https://doi.org/10.1117/12.941740

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