Neutral Ion Beam Figuring Of Large Optical Surfaces

S. R. Wilson; J. R. McNeil

doi:10.1117/12.978903

1 January 1987 Neutral Ion Beam Figuring Of Large Optical Surfaces

S. R. Wilson, J. R. McNeil

Proceedings Volume 0818, Current Developments in Optical Engineering II; (1987) https://doi.org/10.1117/12.978903
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

The figuring of large optical components using mechanical techniques is a time and money consuming operation. Neutral Ion Beam Figuring (IBF) is shown to be a practical and flexible alternative to mechanical figuring. Ion Beam Figuring is performed by directing a broad beam high current ion source (Kaufman type) onto an optic in a carefully controlled manner, removing substrate material by ion beam sputtering, and resulting in a specified surface figure. The IBF technique is shown to have some interesting performance advantages over other methods, including very high removal rates, minimal surface damage, and no edge effects. Practical issues involving IBF are discussed and experimental results using the UNM prototype IBF machine to figure a 30cm fused silica optic are presented. Scaling problems are identified and discussed.

Citation Download Citation

S. R. Wilson and J. R. McNeil "Neutral Ion Beam Figuring Of Large Optical Surfaces", Proc. SPIE 0818, Current Developments in Optical Engineering II, (1 January 1987); https://doi.org/10.1117/12.978903

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available