Effect of the deposition processes on the micro-defects and laser-induced damage threshold of thin films

Dongping Zhang; Ping Fan; Guangxing Liang; Ting Zhang; Xingmin Cai; Rengui Huang

doi:10.1117/12.909849

12 January 2012 Effect of the deposition processes on the micro-defects and laser-induced damage threshold of thin films

Dongping Zhang, Ping Fan, Guangxing Liang, Ting Zhang, Xingmin Cai, Rengui Huang

Author Affiliations +

Proceedings Volume 8206, Pacific Rim Laser Damage 2011: Optical Materials for High Power Lasers; 82060O (2012) https://doi.org/10.1117/12.909849
Event: Pacific Rim Laser Damage Symposium: Optical Materials for High Power Lasers, 2011, Shanghai, China

Abstract

Micro-defect is one of key limiting factors in the improvement of the laser-induced damage threshold (LIDT) of thin films. In the present paper, thin films were prepared using the electron-beam evaporation technique with different coating materials and pre-melting processes. The relationships of thin film LIDT with impurity element content and with pre-melting processes were investigated. The experiment results indicate that a number of impurity elements play an important role in the LIDT of the samples. An efficient pre-melting process is necessary to maintain deposition stability, which could also reduce micro-defect density in thin films.

Citation Download Citation

Dongping Zhang, Ping Fan, Guangxing Liang, Ting Zhang, Xingmin Cai, and Rengui Huang "Effect of the deposition processes on the micro-defects and laser-induced damage threshold of thin films", Proc. SPIE 8206, Pacific Rim Laser Damage 2011: Optical Materials for High Power Lasers, 82060O (12 January 2012); https://doi.org/10.1117/12.909849

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