Paper
2 February 1988 Surface Smoothing Effects Of Thin Films
Ghanim A. Al -Jumaily, John R . McNeil
Author Affiliations +
Abstract
The effects of coatings on the optical scatter and related surface microroughness of coated surfaces are examined. Experimental results indicate that coated surfaces, in some cases, are smoother than the bare substrate. A model for smoothing process is presented. The role of deposition mechanism and substrate morphology are discussed.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ghanim A. Al -Jumaily and John R . McNeil "Surface Smoothing Effects Of Thin Films", Proc. SPIE 0821, Modeling of Optical Thin Films, (2 February 1988); https://doi.org/10.1117/12.941852
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KEYWORDS
Surface finishing

Copper

Polishing

Spatial frequencies

Molybdenum

Diffusion

Optical coatings

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