Preparation Of Electrochromic Metal Oxide Films By Plasma-Enhanced Chemical Vapor Deposition

D. K. Benson; C. E. Tracy; J.S E.M. Svensson; B. E. Liebert

doi:10.1117/12.941870

12 November 1987 Preparation Of Electrochromic Metal Oxide Films By Plasma-Enhanced Chemical Vapor Deposition

D. K. Benson, C. E. Tracy, J.S E.M. Svensson, B. E. Liebert

Proceedings Volume 0823, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion VI; (1987) https://doi.org/10.1117/12.941870
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

Laboratory procedures have been developed for depositing thin films of electrochromic metal oxides by plasma-enhanced chemical vapor deposition (PE-CVD). In this process, vapor phase reactants, such as tungsten hexafluotIde, are mixed with oxygen and excited by RF energy at a frequency of 13.56 MHz and power levels up to≈1W/cm² substrate area. Large rates of oxide deposition have been achieved (> 8 nm/s) making this process a candidate for high-speed coating of large area substrates, such as window glass. Amorphous WO1 films prepared by PE-CVD have been shown to have electrochromic responses virtually identical to films prepared by vacuum evaporation. The lithium ion diffusion rate, for example, is approximately 1.3 x 10^-11cm² /s at x = 0.03 in Li_xWO₃ prepared by PE-CVD. On the other hand, molybdenum oxide films and mixed molybdenum/tungsten oxide films prepared by PE-CVD from the hexafluorides differ markedly from vacuum evaporated films. Their electrochromic responses are spectrally different and are much slower. Lithium ion diffusion rates in such Mo0₃ films are lower by about three orders of magnitude. These differences are tentatively attributed to a large fraction of fluorine (Mo:F ratios of the order of 2:1) which are incorporated into the molybdenum and mixed oxides, but are not incorporated into the tungsten oxides.

Citation Download Citation

D. K. Benson, C. E. Tracy, J.S E.M. Svensson, and B. E. Liebert "Preparation Of Electrochromic Metal Oxide Films By Plasma-Enhanced Chemical Vapor Deposition", Proc. SPIE 0823, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion VI, (12 November 1987); https://doi.org/10.1117/12.941870

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