Structural and photoelectronic properties of a-SiGe:H thin films with varied Ge prepared by PECVD

Rui Xu; Wei Li; Jian He; Kang-Cheng Qi; Ya-Dong Jiang

doi:10.1117/12.904214

17 December 2011 Structural and photoelectronic properties of a-SiGe:H thin films with varied Ge prepared by PECVD

Rui Xu, Wei Li, Jian He, Kang-Cheng Qi, Ya-Dong Jiang

Proceedings Volume 8312, Display, Solid-State Lighting, Photovoltaics, and Optoelectronics in Energy III; 83120Q (2011) https://doi.org/10.1117/12.904214
Event: SPIE/OSA/IEEE Asia Communications and Photonics, 2011, Shanghai, China

Abstract

Hydrogenated amorphous silicon-germanium (a-SiGe:H) alloy thin films were fabricated by conventional radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) with a gas mixture of silane (SiH4) and germane (GeH4). The structural, optical and electrical properties of the films with different gas volume fraction of germane were investigated by Raman and Fourier transform infrared (FTIR) spectroscopy, ultraviolet and visible (UV-vis) spectroscopy and I-V curves, respectively. The amorphous network and structural disorder in the a-SiGe:H thin films were evaluated by Raman spectroscopy. Meanwhile, the Si-H and Ge-H configurations of the films were investigated by FTIR spectroscopy. From UV-vis spectroscopy and I-V curves, the optical and electrical properties of the testing films could be deduced with varied germanium. It can be concluded that the structural and photoelectronic properties of a-SiGe:H thin films can be influenced apparently by varing of GeH4/(SiH4+ GeH4) ratio in PECVD process.

Citation Download Citation

Rui Xu, Wei Li, Jian He, Kang-Cheng Qi, and Ya-Dong Jiang "Structural and photoelectronic properties of a-SiGe:H thin films with varied Ge prepared by PECVD", Proc. SPIE 8312, Display, Solid-State Lighting, Photovoltaics, and Optoelectronics in Energy III, 83120Q (17 December 2011); https://doi.org/10.1117/12.904214

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available