Nanoparticle size and shape evaluation using the TSOM method

Bradley Damazo; Ravikiran Attota; Purushotham Kavuri; András E. Vladár

doi:10.1117/12.918263

5 April 2012 Nanoparticle size and shape evaluation using the TSOM method

Bradley Damazo, Ravikiran Attota, Purushotham Kavuri, András E. Vladár

Proceedings Volume 8324, Metrology, Inspection, and Process Control for Microlithography XXVI; 832436 (2012) https://doi.org/10.1117/12.918263
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

A novel through-focus scanning optical microscopy (TSOM) method that yields nanoscale information from optical images obtained at multiple focal planes will be used here for nanoparticle dimensional analysis. The TSOM method can distinguish not only size differences but also shape differences among nanoparticles. Size evaluation based on simulations will be presented along with experimental data for nanoparticles and nanodots with sizes below 100 nm. Size determination using an experimentally created library will also be presented.

Citation Download Citation

Bradley Damazo, Ravikiran Attota, Purushotham Kavuri, and András E. Vladár "Nanoparticle size and shape evaluation using the TSOM method", Proc. SPIE 8324, Metrology, Inspection, and Process Control for Microlithography XXVI, 832436 (5 April 2012); https://doi.org/10.1117/12.918263

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