Real-time imaging with THz fully-customized uncooled amorphous-silicon microbolometer focal plane arrays

F. Simoens; J. Meilhan; B. Delplanque; S. Gidon; G. Lasfargues; J. Lalanne Dera; D. T. Nguyen; J. L. Ouvrier-Buffet; S. Pocas; T. Maillou; O. Cathabard; S. Barbieri

doi:10.1117/12.919185

9 May 2012 Real-time imaging with THz fully-customized uncooled amorphous-silicon microbolometer focal plane arrays

F. Simoens, J. Meilhan, B. Delplanque, S. Gidon, G. Lasfargues, J. Lalanne Dera, D. T. Nguyen, J. L. Ouvrier-Buffet, S. Pocas, T. Maillou, O. Cathabard, S. Barbieri

Author Affiliations +

Proceedings Volume 8363, Terahertz Physics, Devices, and Systems VI: Advanced Applications in Industry and Defense; 83630D (2012) https://doi.org/10.1117/12.919185
Event: SPIE Defense, Security, and Sensing, 2012, Baltimore, Maryland, United States

Abstract

Terahertz uncooled antenna-coupled microbolometer focal plane arrays are being developed at CEA-LETI for THz imaging and sensing. This detector technology relies on amorphous silicon bolometer know-how and aims at opening the way to real-time video rate 2D imaging, with potential low cost either in fabrication and in operation. First prototypes of 320x240 pixel arrays have been designed for 1-3 THz sensing. Sensors have been fabricated monolithically above CMOS Integrated Circuits while applying only full Si standard silicon processes. We present the results of extensive work of characterization and simulations made to estimate the sensitivity and spectral absorption of these prototypes. Tests of latest real-time imaging with active illumination by QCLs are then reported while explosives samples were placed in an optical set-up in reflection configuration.

Citation Download Citation

F. Simoens, J. Meilhan, B. Delplanque, S. Gidon, G. Lasfargues, J. Lalanne Dera, D. T. Nguyen, J. L. Ouvrier-Buffet, S. Pocas, T. Maillou, O. Cathabard, and S. Barbieri "Real-time imaging with THz fully-customized uncooled amorphous-silicon microbolometer focal plane arrays", Proc. SPIE 8363, Terahertz Physics, Devices, and Systems VI: Advanced Applications in Industry and Defense, 83630D (9 May 2012); https://doi.org/10.1117/12.919185

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available