Analysis of chemical polishing for optical elements

Lingyan Jiao; Yuzhu Jin; Nana Lin; Tao Liu; Yi Tong; Dongxun Wu; Changshun Hui

doi:10.1117/12.977233

16 October 2012 Analysis of chemical polishing for optical elements

Lingyan Jiao, Yuzhu Jin, Nana Lin, Tao Liu, Yi Tong, Dongxun Wu, Changshun Hui

Proceedings Volume 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 84161N (2012) https://doi.org/10.1117/12.977233
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

It is impossible to polish the groove or channel’s surface by traditional method. Chemical polishing, using solutions to erode glass, is adopted in this paper with the aim for getting smooth surface. Nature of glass, composition of polishing slurry, type of polishing products, and some process parameters are studied; in the meanwhile, SEM, metallurgical microscope, profile meter and Visible-UV spectrophotometer are utilized. The result shows that the polished surfaces with high quality depend on the buffering effect of polishing solution, high solubility to polishing products, smaller size of generated salt crystal. Also, it is indispensable to select proper temperature, time and removal rate to realize precision polishing.

Citation Download Citation

Lingyan Jiao, Yuzhu Jin, Nana Lin, Tao Liu, Yi Tong, Dongxun Wu, and Changshun Hui "Analysis of chemical polishing for optical elements", Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 84161N (16 October 2012); https://doi.org/10.1117/12.977233

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available