Two-dimensional structural surface measurement based on spectrally
resolved white-light interferometry

Wantao Deng; Kaiwei Wang; Jinchun Zhang

doi:10.1117/12.964378

15 October 2012 Two-dimensional structural surface measurement based on spectrally resolved white-light interferometry

Wantao Deng, Kaiwei Wang, Jinchun Zhang

Proceedings Volume 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 84170F (2012) https://doi.org/10.1117/12.964378
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

By analyzing the spectral domain’s phase information, the spectrally resolved white-light interferometry (SRWLI) is capable of obtaining the profile with a single frame of interferogram. However, only one-dimensional (1-D) surfaces can be tested with this technique, otherwise the interference patterns under adjacent wavelengths would overlap each other, which would make the whole interferogram hard to identify. We present here a 2-D SRWLI method which can be applied to measure narrow rectangle areas. Frequency comb is produced by means of using a F-P etalon to filter the broadband source. With the filtered frequency comb illumination, the interference patterns under adjacent wavelengths would be separated by a little distance, which enables us to obtain a 2-D profile with a small width. The experimental details of measurement of a step sample are discussed in this paper.

Citation Download Citation

Wantao Deng, Kaiwei Wang, and Jinchun Zhang "Two-dimensional structural surface measurement based on spectrally resolved white-light interferometry", Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 84170F (15 October 2012); https://doi.org/10.1117/12.964378

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