Design and analysis of hologram alignment mark

Shijie Li; Fan Wu; Qiang Chen

doi:10.1117/12.971196

15 October 2012 Design and analysis of hologram alignment mark

Shijie Li, Fan Wu, Qiang Chen

Proceedings Volume 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 84172G (2012) https://doi.org/10.1117/12.971196
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

When testing an off-axis aspheric surface using Computer Generated Hologram (CGH), multiple combined CGH can not only test the off-axis aspheric surface but also align every element in test system. The alignment transmission CGH with a rectangle aperture, which produces an alignment mark at the designated point, can be used to align the off-axis aspheric surface and CGH. Hologram alignment mark is introduced firstly, then the design of hologram alignment mark is deduced in detail and a formula of calculating the position coordinate of every point on fringes is got. After that its diffraction characteristics are analyzed based on Fresnel diffraction theory, which is in line with Fraunhofer diffraction, and the effects of different length-width ratio of rectangle aperture are simulated. Finally an example of hologram alignment mark and its corresponding actual mark picture are given.

Citation Download Citation

Shijie Li, Fan Wu, and Qiang Chen "Design and analysis of hologram alignment mark", Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 84172G (15 October 2012); https://doi.org/10.1117/12.971196

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