Research on radii of curvature measurement for micro-accessory in precision and ultra-precision machining

Xinli Tian; Jianquan Wang; Baoguo Zhang; Xiujian Tang; Fuqiang Li

doi:10.1117/12.966405

15 October 2012 Research on radii of curvature measurement for micro-accessory in precision and ultra-precision machining

Xinli Tian, Jianquan Wang, Baoguo Zhang, Xiujian Tang, Fuqiang Li

Author Affiliations +

Proceedings Volume 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems; 841817 (2012) https://doi.org/10.1117/12.966405
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

To measure the radii of curvature (ROC) for micro-accessories in precision and ultra-precision with high accuracy, the thesis put forward a new technology based on digital images of scanning electron microscope (SEM), in which the contour line of specimen was attained and the ROC was calculated after data fitting. The Canny edge detection and some other image processing techniques were successively adopted to extract the edge profile of single diamond particle. Then a high order polynomial was used in view of the least square law to fit the sampling point coordinates of contour line nonlinearly. Lastly, the ROC could be computed according to the metric ruler of SEM and the proposed formula. The measurement result shows that the deviation between the technology and current methods is no more than 10%, as the magnification rate of SEM, the amount of sampling points on contour line and the order of fitting model are 1200, 80, 20 respectively. Besides, the measurement accuracy can reach a nanometer scale. This research also indicates that it is suitable for the ROC measurement of non-optical small parts or other micro-accessories with high feasibility and application value.

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Xinli Tian, Jianquan Wang, Baoguo Zhang, Xiujian Tang, and Fuqiang Li "Research on radii of curvature measurement for micro-accessory in precision and ultra-precision machining", Proc. SPIE 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 841817 (15 October 2012); https://doi.org/10.1117/12.966405

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KEYWORDS

Diamond

Particles

Scanning electron microscopy

Edge detection

Data modeling

Detection and tracking algorithms

Image acquisition

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