IR-SWLI for subsurface imaging of large MEMS structures

A. Nolvi; V. Heikkinen; I. Kassamakov; J. Aaltonen; T. Ylitalo; O. Saresoja; M. Berdova; S. Franssila; E. Hæggström

doi:10.1117/12.922105

4 May 2012 IR-SWLI for subsurface imaging of large MEMS structures

A. Nolvi, V. Heikkinen, I. Kassamakov, J. Aaltonen, T. Ylitalo, O. Saresoja, M. Berdova, S. Franssila, E. Hæggström

Proceedings Volume 8430, Optical Micro- and Nanometrology IV; 843018 (2012) https://doi.org/10.1117/12.922105
Event: SPIE Photonics Europe, 2012, Brussels, Belgium

Abstract

LED based infrared scanning white light interferometry (IR-SWLI) permits non-destructive imaging of embedded MEMS structures. We built an IR-SWLI instrument featuring a custom-built IR-range LED-based light source, capable of stroboscopic use. The source combines multiple separately controllable LEDs with different wavelengths into a collimated homogenous beam offering an adjustable spectrum. We employ software-based image stitching to form millimeter-size 3D images from multiple high magnification scans. These images delineate three layers in a MEMS cavity covered by silicon and reveal a micron-size inlet inside the channel.

Citation Download Citation

A. Nolvi, V. Heikkinen, I. Kassamakov, J. Aaltonen, T. Ylitalo, O. Saresoja, M. Berdova, S. Franssila, and E. Hæggström "IR-SWLI for subsurface imaging of large MEMS structures", Proc. SPIE 8430, Optical Micro- and Nanometrology IV, 843018 (4 May 2012); https://doi.org/10.1117/12.922105

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available